Title:
基板処理装置および基板処理方法
Document Type and Number:
Japanese Patent JP5865093
Kind Code:
B2
Inventors:
Daiki Hinode
Nomura Masashi
Nomura Masashi
Application Number:
JP2012014546A
Publication Date:
February 17, 2016
Filing Date:
January 26, 2012
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/304; H01L21/027
Domestic Patent References:
| JP2008103611A | ||||
| JP2001189260A | ||||
| JP2004223322A |
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki
Masahide Yasuda
Mio Kawasaki
Masahide Yasuda