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Patent Searching and Data


Title:
照明光学装置、露光装置及びデバイスの製造方法
Document Type and Number:
Japanese Patent JP5867576
Kind Code:
B2
Inventors:
Hiroyuki Hirota
Application Number:
JP2014255739A
Publication Date:
February 24, 2016
Filing Date:
December 18, 2014
Export Citation:
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Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; G02B19/00
Domestic Patent References:
JP2002353105A
JP2006171426A
JP9133862A
JP11003849A
JP2006086529A
JP2009290220A
JP2009008997A
JP2004006440A
Foreign References:
WO2006085626A1
Attorney, Agent or Firm:
Seiji Ohno
Kobayashi Hideyoshi
Shinji Kato
Mamoru Suzuki
Hiroshi Otani