Title:
照明光学装置、露光装置及びデバイスの製造方法
Document Type and Number:
Japanese Patent JP5867576
Kind Code:
B2
Inventors:
Hiroyuki Hirota
Application Number:
JP2014255739A
Publication Date:
February 24, 2016
Filing Date:
December 18, 2014
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; G02B19/00
Domestic Patent References:
JP2002353105A | ||||
JP2006171426A | ||||
JP9133862A | ||||
JP11003849A | ||||
JP2006086529A | ||||
JP2009290220A | ||||
JP2009008997A | ||||
JP2004006440A |
Foreign References:
WO2006085626A1 |
Attorney, Agent or Firm:
Seiji Ohno
Kobayashi Hideyoshi
Shinji Kato
Mamoru Suzuki
Hiroshi Otani
Kobayashi Hideyoshi
Shinji Kato
Mamoru Suzuki
Hiroshi Otani