Title:
電気絶縁層を析出する方法
Document Type and Number:
Japanese Patent JP5876985
Kind Code:
B2
Inventors:
Rum, Jurgen
Ball love, christian
Ball love, christian
Application Number:
JP2010532514A
Publication Date:
March 02, 2016
Filing Date:
February 29, 2008
Export Citation:
Assignee:
Oerlikon Surface Solutions Akchen Gesellshaft, Trüpbach
International Classes:
C23C14/24; C23C14/08; H05H1/48
Foreign References:
| EP0666335A1 | ||||
| WO2006099754A1 | ||||
| CA2601722A1 | ||||
| WO2006099758A1 |
Attorney, Agent or Firm:
Fukami patent office