気相成長装置 - Taiyo Nippon Sanso Co., Ltd.

Title:

気相成長装置

Document Type and Number:

Japanese Patent JP5881389

Kind Code:

B2

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Inventors:

Kazumasa Ikenaga
Akira Yamaguchi
Yasushi Uchiyama

Application Number:

JP2011259488A

Publication Date:

March 09, 2016

Filing Date:

November 28, 2011

Export Citation:

Assignee:

Taiyo Nippon Sanso Co., Ltd.
Taiyo Nippon Cse Co., Ltd.

International Classes:

H01L21/683; C23C16/52; H01L21/205

Domestic Patent References:

Foreign References:

WO2011114677A1

Attorney, Agent or Firm:

Toshihiko Ishikawa

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Next Patent: JPS5881390