Title:
感活性光線性又は感放射線性樹脂組成物、レジスト膜、パターン形成方法、及び電子デバイスの製造方法
Document Type and Number:
Japanese Patent JP5883897
Kind Code:
B2
Inventors:
Hidetomo Takahashi
Shuhei Yamaguchi
Kataoka Shohei
Shirakawa Mitsuhiro
Fumihiro Yoshino
Shoichi Saito
Shuhei Yamaguchi
Kataoka Shohei
Shirakawa Mitsuhiro
Fumihiro Yoshino
Shoichi Saito
Application Number:
JP2014079581A
Publication Date:
March 15, 2016
Filing Date:
April 08, 2014
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/038; G03F7/004; G03F7/039; G03F7/32
Domestic Patent References:
| JP2011053363A | ||||
| JP2010020204A | ||||
| JP2003337419A | ||||
| JP2002072477A | ||||
| JP2012141458A |
Foreign References:
| WO2009051088A1 |
Attorney, Agent or Firm:
Takeshi Takamatsu
Toshiyuki Ozawa
Toshiyuki Ozawa