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Title:
アダマンチル(メタ)アクリル系モノマー及びそれを繰り返し単位に含む(メタ)アクリル系重合体
Document Type and Number:
Japanese Patent JP5884728
Kind Code:
B2
Abstract:
Provided according to the present invention are an adamantyl (meth)acrylate represented by formula (1), having a formazin standard turbidity of less than 1.7 NTU (Nephelometric Turbidity Unit) in methylethylketone or tetrahydrofuran, and also a (meth)acrylic copolymer comprising the adamantyl (meth)acrylate as a repeating unit: (in the formula, R1 represents hydrogen or a methyl group; R2 through R4 each independently represent a hydrogen atom, a hydroxyl group, an alkyl group having a carbon number of 1 to 3, an aryl group, an alkoxy group, an aryloxy group, a halogen group, an alkyl halide group, or a hydroxyalkyl group; and nl represents 0 or 1).

Inventors:
Kikuo Furukawa
Shunji Yamashita
Yoshio Nishimura
Application Number:
JP2012509471A
Publication Date:
March 15, 2016
Filing Date:
March 29, 2011
Export Citation:
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Assignee:
Mitsubishi Gas Chemical Co., Ltd.
International Classes:
C08F20/10; C07C67/08; C07C69/54
Domestic Patent References:
JP2009143827A2009-07-02
JP2009091334A2009-04-30
JP2004323704A2004-11-18
Other References:
JPN6015001474; Shida, N et al: 'Advanced Materials for 193-nm Resists' Journal of Photopolymer Science and Technology Vol13, No.4, 2000, 601-606
Attorney, Agent or Firm:
Hiroshi Kobayashi
Kyoei Sugiyama
Taro Ushio
Yasuhito Suzuki