Title:
アライメントステージ
Document Type and Number:
Japanese Patent JP5887278
Kind Code:
B2
Abstract:
An alignment stage including: a base plate; one or more X direction thrust generation guide mechanisms for generating thrust and performing guidance in the direction of a straight line X; a pair of lower plates disposed above the X direction thrust generation guide mechanisms; a pair of upper plates provided corresponding to the lower plates, respectively; a pair of rotatable bearings disposed between the lower plates and the upper plates; one or more Y direction thrust generation guide mechanisms for generating thrust and performing guidance in the direction of a straight line Y perpendicular to the straight line X; and a table plate disposed above the Y direction thrust generation guide mechanisms. With this configuration, it is possible for the alignment stage to be compact and easy to assemble.
Inventors:
Takafumi Komatsu
Katsuya Fukushima
Katsuya Fukushima
Application Number:
JP2012546686A
Publication Date:
March 16, 2016
Filing Date:
November 25, 2011
Export Citation:
Assignee:
THK CO.,LTD.
International Classes:
B23Q1/48; G12B5/00
Domestic Patent References:
| JP2006136991A | 2006-06-01 | |||
| JP2007266585A | 2007-10-11 |
Attorney, Agent or Firm:
Hiroaki Kaita
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