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Title:
ガス放出機構付きキャンロール及びそれを備えた長尺基板の処理装置及び処理方法
Document Type and Number:
Japanese Patent JP5888154
Kind Code:
B2
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Inventors:
Hideharu Ogami
Application Number:
JP2012153823A
Publication Date:
March 16, 2016
Filing Date:
July 09, 2012
Export Citation:
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Assignee:
Sumitomo Metal Mining Co., Ltd.
International Classes:
C23C14/56; H05K3/00
Domestic Patent References:
JP2012117130A
Foreign References:
US20100291308
Attorney, Agent or Firm:
Noriyuki Tsujikawa
Masao Yamamoto



 
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