Title:
光インプリント用樹脂組成物、パターン形成方法及びエッチングマスク
Document Type and Number:
Japanese Patent JP5890323
Kind Code:
B2
Inventors:
Hayashida Nohisa
Takuro Satsuka
Akiyo Ikeda
Duo Norio
Takemori Riu
Takuro Satsuka
Akiyo Ikeda
Duo Norio
Takemori Riu
Application Number:
JP2012552640A
Publication Date:
March 22, 2016
Filing Date:
December 02, 2011
Export Citation:
Assignee:
Maruzen Petrochemical Co., Ltd.
International Classes:
C08F226/12; B29C59/02; C08F216/12; C08F220/20; H01L21/027
Domestic Patent References:
| JP2009256462A | 2009-11-05 | |||
| JP2010197682A | 2010-09-09 | |||
| JP2009256462A | 2009-11-05 | |||
| JP2010197682A | 2010-09-09 | |||
| JP2011081902A | 2011-04-21 | |||
| JPH07309947A | 1995-11-28 | |||
| JPH06301322A | 1994-10-28 |
Foreign References:
| WO2010137501A1 | 2010-12-02 | |||
| US20100167180A1 | 2010-07-01 | |||
| WO2010137501A1 | 2010-12-02 | |||
| US20100167180A1 | 2010-07-01 |
Attorney, Agent or Firm:
Kenji Izumina
Toshiharu Ogawa
Toshiharu Ogawa