Title:
検査装置
Document Type and Number:
Japanese Patent JP5890953
Kind Code:
B2
Inventors:
Kenji Arai
Miyake Yui
Miyake Yui
Application Number:
JP2013202854A
Publication Date:
March 22, 2016
Filing Date:
September 30, 2013
Export Citation:
Assignee:
Nagoya Electric Industry Co., Ltd.
International Classes:
G01B11/24; G01N21/956
Domestic Patent References:
| JP11173994A | ||||
| JP2004279273A | ||||
| JP2009244162A | ||||
| JP2001089939A |
Attorney, Agent or Firm:
Hironobu Isoyama