Title:
検出装置の製造方法
Document Type and Number:
Japanese Patent JP5897362
Kind Code:
B2
Inventors:
Kazuhiro Hara
Sawade Ken
Sawade Ken
Application Number:
JP2012062597A
Publication Date:
March 30, 2016
Filing Date:
March 19, 2012
Export Citation:
Assignee:
Tokyo Denki University
International Classes:
G01N27/12
Domestic Patent References:
| JP8278273A | ||||
| JP7318524A | ||||
| JP2010249692A |
Foreign References:
| WO2012168444A1 | ||||
| US20090020422 |
Other References:
澤出憲、原和裕,空隙のある多層薄膜を用いた水素センサの研究,平成24年電気学会全国大会講演論文集,2012年 3月 5日,p.206
Attorney, Agent or Firm:
Shinji Hayami