Title:
基板保持装置および研磨装置
Document Type and Number:
Japanese Patent JP5898052
Kind Code:
B2
Inventors:
Umemoto Masao
Toru Maruyama
Toru Maruyama
Application Number:
JP2012260594A
Publication Date:
April 06, 2016
Filing Date:
November 29, 2012
Export Citation:
Assignee:
Ebara Corporation
International Classes:
B24B37/30; H01L21/304
Domestic Patent References:
| JP2009131946A | ||||
| JP4008940U | ||||
| JP6241211A | ||||
| JP1171560U |
Attorney, Agent or Firm:
Isamu Watanabe
Ryoji Kosugi
Tetsuya Hirosawa
Ryoji Kosugi
Tetsuya Hirosawa
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