Title:
マグネトロンスパッタ電極及びスパッタリング装置
Document Type and Number:
Japanese Patent JP5903217
Kind Code:
B2
Inventors:
Ryohei Ohno
Takaomi Kurata
Makoto Arai
Kiyota Junya
Akatsuki Ishibashi
Hisazo Nakamura
Takaomi Kurata
Makoto Arai
Kiyota Junya
Akatsuki Ishibashi
Hisazo Nakamura
Application Number:
JP2011065410A
Publication Date:
April 13, 2016
Filing Date:
March 24, 2011
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
C23C14/35; H01L21/285
Domestic Patent References:
| JP9020979A | ||||
| JP7166346A |
Attorney, Agent or Firm:
Seiryu Corporation