Title:
強誘電体膜、ゾルゲル溶液、成膜方法及び強誘電体膜の製造方法
Document Type and Number:
Japanese Patent JP5903591
Kind Code:
B2
Abstract:
To provide a PBNZT ferroelectric film capable of preventing sufficiently oxygen ion deficiency. The PBNZT ferroelectric film according to an embodiment of the present invention is a ferroelectric film including a perovskite-structured ferroelectric substance represented by ABO3, wherein the perovskite-structured ferroelectric substance is a PZT-based ferroelectric substance containing Pb2+ as A-site ions and containing Zr4+ and Ti4+ as B-site ions, and the A-site contains Bi3+ as A-site compensation ions and the B-site contains Nb5+ as B-site compensation ions.
Inventors:
Ken Kijima
Yuji Honda
Yuji Honda
Application Number:
JP2014224292A
Publication Date:
April 13, 2016
Filing Date:
November 04, 2014
Export Citation:
Assignee:
U-Tech Co., Ltd.
International Classes:
H01L21/316; C01G33/00; H01L21/8246; H01L27/105
Domestic Patent References:
| JP2006278986A | ||||
| JP2008084581A | ||||
| JP2007217250A | ||||
| JP2003201106A | ||||
| JP2003128419A |
Attorney, Agent or Firm:
Mutsumi Yanase
Atsushi Watanabe
Atsushi Watanabe