Title:
Index cleaning equipment
Document Type and Number:
Japanese Patent JP5911444
Kind Code:
B2
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| WO/1999/041022 | ACCURATE POSITIONING OF A WAFER |
Inventors:
Toshihide Fujimura
Application Number:
JP2013044956A
Publication Date:
April 27, 2016
Filing Date:
March 07, 2013
Export Citation:
Assignee:
Showa Co., Ltd.
International Classes:
B08B3/02; F26B5/04; F26B25/00
Domestic Patent References:
| JP2001509077A | ||||
| JP7251134A | ||||
| JP6155208A | ||||
| JP5085154A |
Attorney, Agent or Firm:
Hiroshi Masaki
Yuko Mikami
Tadashi Fujikawa
Yuko Mikami
Tadashi Fujikawa
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