Title:
半導体装置レシピ管理方法
Document Type and Number:
Japanese Patent JP5921541
Kind Code:
B2
Abstract:
Systems and methods for managing optical inspection target components are disclosed. A method may include, but is not limited to: storing at least one external recipe component at an inspection tool node; associating at least one proxy component with the at least one external recipe component; associating the at least one external recipe component with at least one optical inspection target recipe; and storing the at least one optical inspection target recipe including the at least one proxy component in a recipe distribution server. A method may include, but is not limited to: receiving a selection of at least one recipe associated with an optical inspection target to be inspected at a first inspection tool node; and determining whether one or more external recipe components associated with the recipe are stored on at least one of the first inspection tool node and a second node.
Inventors:
David Dominique Gerard
Lee Chris W
Lee Chris W
Application Number:
JP2013519684A
Publication Date:
May 24, 2016
Filing Date:
May 24, 2011
Export Citation:
Assignee:
KLA-Tenker Corporation
International Classes:
H01L21/66
Domestic Patent References:
| JP2009272497A | ||||
| JP2009032800A |
Attorney, Agent or Firm:
Patent Corporation yki International Patent Office