蒸気放出装置及び成膜装置

Title:

蒸気放出装置及び成膜装置

Document Type and Number:

Japanese Patent JP5921974

Kind Code:

B2

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Inventors:

Kazuhiko Saito
Masayuki Iijima
Takahiro Hirono
Kenji Nakamori

Application Number:

JP2012147803A

Publication Date:

May 24, 2016

Filing Date:

June 29, 2012

Export Citation:

Assignee:

ULVAC, Inc.

International Classes:

C23C14/24; C23C14/12

Domestic Patent References:

JP2007186750A
JP11323532A

Foreign References:

WO2009101953A1

Attorney, Agent or Firm:

Hideki Abe
Shigeo Ishijima

Previous Patent: シンクロ行動の検出方法、検出装置及び検出プログラム

Next Patent: JPS5921975