Title:
An illumination optical device, an exposure device, and an exposure method
Document Type and Number:
Japanese Patent JP5928632
Kind Code:
B2
Inventors:
Osamu Yatsu
Toshi Nishinaga
Kudo Taketo
Toshi Nishinaga
Kudo Taketo
Application Number:
JP2015076937A
Publication Date:
June 01, 2016
Filing Date:
April 03, 2015
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; G02B19/00
Domestic Patent References:
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Foreign References:
| WO2003075076A1 |
Attorney, Agent or Firm:
Seiji Ohno
Kobayashi Hideyoshi
Shinji Kato
Mamoru Suzuki
Hiroshi Otani
Kobayashi Hideyoshi
Shinji Kato
Mamoru Suzuki
Hiroshi Otani
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