Title:
研削装置
Document Type and Number:
Japanese Patent JP5930192
Kind Code:
B2
Inventors:
Kawana Mamoru
Nobuyuki Takada
Nobuyuki Takada
Application Number:
JP2012131698A
Publication Date:
June 08, 2016
Filing Date:
June 11, 2012
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B7/00; H01L21/304
Domestic Patent References:
| JP2003007661A | ||||
| JP2010017798A |
Attorney, Agent or Firm:
Patent Business Corporation Tokyo Alpa Patent Office
Kyoko Kawamura
Isao Sasaki
Ken Kubo
Kyoko Kawamura
Isao Sasaki
Ken Kubo