Title:
除電用治具及びそれを用いた基板処理装置並びに基板処理装置の除電方法
Document Type and Number:
Japanese Patent JP5932592
Kind Code:
B2
Inventors:
Hitoshi Hashima
Application Number:
JP2012219207A
Publication Date:
June 08, 2016
Filing Date:
October 01, 2012
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H05F3/04; H01L21/02; H01T23/00
Domestic Patent References:
| JP2008141043A | ||||
| JP2520840B2 | ||||
| JP9102444A | ||||
| JP2007242702A | ||||
| JP2001332465A | ||||
| JP2006196291A |
Attorney, Agent or Firm:
Kikuhiko Nakamoto
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