Title:
基板収納容器
Document Type and Number:
Japanese Patent JP5960078
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a substrate storage container which includes on-off valves at places capable of accepting a plurality of purge devices having different specifications from each other despite an extremely simple constitution.SOLUTION: A substrate storage container comprises on-off valves for substituting a gas in a container body via a through hole. Each on-off valve includes: a housing on which an air vent for passing the gas is formed; a filter arranged to block the air vent; and a check valve arranged in the air vent. The housing includes: a first housing located on the side of being attached to the container body; and a second housing which is located on the side of supply and discharge of the gas and eccentric with respect to the first housing. The air vent is formed substantially at a position of a central axis of the second housing and formed at a position displaced from a central axis of the first housing.
Inventors:
Ogawa Tsutomu
Application Number:
JP2013031546A
Publication Date:
August 02, 2016
Filing Date:
February 20, 2013
Export Citation:
Assignee:
Shin-Etsu Polymer Co., Ltd.
International Classes:
H01L21/673; B65D81/20; B65D85/86
Domestic Patent References:
| JP2009246154A | ||||
| JP2007533166A | ||||
| JP2004146676A |
Foreign References:
| WO2008029557A1 |
Attorney, Agent or Firm:
Tomohiro Sakamoto