Title:
熱式質量流量計
Document Type and Number:
Japanese Patent JP5961592
Kind Code:
B2
Abstract:
In order to provide a thermal mass flowmeter which makes higher accuracy of gas flowrate measurement possible while reliability in the thermal mass flowmeter is ensured (while deterioration or breakage caused by droplet adhesion is prevented), the thermal mass flowmeter according to the present invention has a heating element for generating heat by conduction, a temperature detection bridge circuit for detecting a temperature of the heating element, and a sensor element driving circuit portion connected to the heating element and the temperature detection bridge circuit and executing conduction control to the heating element, in which the sensor element driving circuit portion has an output mechanism and an output impedance adjustment mechanism and the output impedance adjustment mechanism is disposed between the output mechanism and the heating element and its output impedance is higher than an electric resistance value of the heating element and less than 1 M©.
Inventors:
Masahiro Matsumoto
Hiroshi Nakano
Asano Satoshi
Yasuo Onose
Hiroshi Nakano
Asano Satoshi
Yasuo Onose
Application Number:
JP2013162839A
Publication Date:
August 02, 2016
Filing Date:
August 06, 2013
Export Citation:
Assignee:
Hitachi Automotive Systems, Ltd.
International Classes:
G01P5/12; G01F1/698
Domestic Patent References:
| JP3468727B2 |
Attorney, Agent or Firm:
Polaire Patent Business Corporation