Title:
検査装置
Document Type and Number:
Japanese Patent JP6267445
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a low-cost inspection device.SOLUTION: The inspection device includes: beam generation means for generating either a charged particle or an electromagnetic wave as a beam; a primary optical system for leading and radiating the beam onto an inspection object retained on a movable stage in a working chamber; a secondary optical system for detecting a secondary charged particle generated from the inspection object; and an image processing system for forming an image on the basis of the detected secondary charged particle. Further, the inspection device includes: a linear motor for driving the movable stage; and a Helmholtz coil for generating a magnetic field to cancel a magnetic field generated from the linear motor when driving the movable stage.
Inventors:
Shoji Yoshikawa
Application Number:
JP2013122042A
Publication Date:
January 24, 2018
Filing Date:
June 10, 2013
Export Citation:
Assignee:
Ebara Corporation
International Classes:
H01J37/20; H01J37/28
Domestic Patent References:
| JP2003037047A | ||||
| JP2002289506A | ||||
| JP2002050567A | ||||
| JP10172438A | ||||
| JP2007113965A |
Foreign References:
| US20130126727 |
Attorney, Agent or Firm:
Seiji Ohno
Koji Morita
Osamu Tsuda
Mamoru Suzuki
Shinji Kato
Koji Morita
Osamu Tsuda
Mamoru Suzuki
Shinji Kato