Title:
Ｃｕ配線の製造方法
Document Type and Number:
Japanese Patent JP6268036
Kind Code:
B2
Inventors:
Tadashi Ishizaka
Tatsuro Hirasawa
Takashi Sakuma
Yokoyama Atsushi
Tatsuro Hirasawa
Takashi Sakuma
Yokoyama Atsushi
Application Number:
JP2014102456A
Publication Date:
January 24, 2018
Filing Date:
May 16, 2014
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/3205; C23C14/06; C23C14/14; C23C14/34; C23C16/06; H01L21/28; H01L21/285; H01L21/768; H01L23/532
Domestic Patent References:
| JP2012169590A | ||||
| JP2006148075A | ||||
| JP2004289008A | ||||
| JP2012074522A | ||||
| JP2012216765A | ||||
| JP2000012684A |
Foreign References:
| US20140030886 |
Attorney, Agent or Firm:
Hiroshi Takayama
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