Title:
現像剤組成物、およびフォトリソグラフィパターンを形成する方法
Document Type and Number:
Japanese Patent JP6290332
Kind Code:
B2
Inventors:
Yang Chul Bae
Sun-Hyun Lee
Sun-Hyun Lee
Application Number:
JP2016159080A
Publication Date:
March 07, 2018
Filing Date:
August 15, 2016
Export Citation:
Assignee:
Rohm and Haas Electronic Materials LLC
International Classes:
G03F7/32; G03F7/20; G03F7/40; H01L21/027
Domestic Patent References:
| JP58168229A | ||||
| JP53142876A | ||||
| JP2011197587A | ||||
| JP2012032780A | ||||
| JP2011033841A | ||||
| JP2010217884A | ||||
| JP2010152353A |
Attorney, Agent or Firm:
Patent Business Corporation Sender International Patent Office