Title:
基板支持構造
Document Type and Number:
Japanese Patent JP6378403
Kind Code:
B2
Inventors:
Junji Nakatani
Application Number:
JP2017120975A
Publication Date:
August 22, 2018
Filing Date:
June 21, 2017
Export Citation:
Assignee:
Koyo Thermo System Co., Ltd.
International Classes:
H01L21/683
Domestic Patent References:
| JP2009246099A | ||||
| JP62012562A | ||||
| JP8321536A | ||||
| JP9265064A | ||||
| JP7041071A | ||||
| JP8244909A | ||||
| JP2005274711A | ||||
| JP2000501243A | ||||
| JP4988477U | ||||
| JP3045888U |
Attorney, Agent or Firm:
Kaede International Patent Office