Title:
レーザ処理システム内の粒子制御
Document Type and Number:
Japanese Patent JP6382290
Kind Code:
B2
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Inventors:
Hunter, Aaron Muir
Bejat, Meheran
Adams, Bruce E.
Bejat, Meheran
Adams, Bruce E.
Application Number:
JP2016255927A
Publication Date:
August 29, 2018
Filing Date:
December 28, 2016
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01L21/268; H01L21/265
Domestic Patent References:
| JP2002210582A | ||||
| JP10113786A | ||||
| JP2000260730A | ||||
| JP1152718A | ||||
| JP9040499A | ||||
| JP2007500447A | ||||
| JP2002524263A |
Attorney, Agent or Firm:
Sonoda/Kobayashi Patent Business Corporation