Title:
光学フィルターデバイス、光学モジュール、及び電子機器
Document Type and Number:
Japanese Patent JP6384239
Kind Code:
B2
Abstract:
An optical filter device includes a wavelength variable interference filter that includes a pair of reflective films which face each other, and a fixed substrate in which one of the pair of reflective films is provided; a base to which the fixed substrate is fixed; and a fixing member which fixes one place on the fixed substrate to the base, a surface which is on other place of the one place of the substrate and the base are disposed with a gap therebetween.
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Inventors:
Daisuke Saito
Fujisawa Satoshi
Yasushi Matsuno
Hirokubo Nozomi
Fujisawa Satoshi
Yasushi Matsuno
Hirokubo Nozomi
Application Number:
JP2014198455A
Publication Date:
September 05, 2018
Filing Date:
September 29, 2014
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G02B26/00; B81B3/00; G01J3/26; G01J3/51; G02B5/28
Domestic Patent References:
| JP2015068887A | ||||
| JP2013167701A | ||||
| JP2257676A | ||||
| JP63210912A | ||||
| JP2012195417A |
Foreign References:
| US20070242358 |
Attorney, Agent or Firm:
Intellectual Property Office