Title:
テープ貼付装置及びテープ貼付治具
Document Type and Number:
Japanese Patent JP6388331
Kind Code:
B2
Inventors:
Senda Masao
Kazumasa Nishiwaki
Kazumasa Nishiwaki
Application Number:
JP2014144423A
Publication Date:
September 12, 2018
Filing Date:
July 14, 2014
Export Citation:
Assignee:
NEC Platforms, Ltd.
International Classes:
H01L21/683; H01L21/304
Domestic Patent References:
| JP2003133395A | ||||
| JP2005026377A | ||||
| JP2003209082A | ||||
| JP2005129678A | ||||
| JP2006310338A | ||||
| JP2005340390A | ||||
| JP2013016571A |
Foreign References:
| WO2009128376A1 |
Attorney, Agent or Firm:
Ken Ieiri