Title:
ネガ型感光性樹脂組成物、電子装置、ネガ型感光性ポリマーの製造方法、およびネガ型感光性樹脂組成物の製造方法
Document Type and Number:
Japanese Patent JP6398310
Kind Code:
B2
Abstract:
This invention provides a negative photosensitive resin composition, an electronic device and a polymer having excellent balance between resolution and the time required for forming pattern. This invention provides a negative photosensitive resin composition comprising the following polymer and photo free radical polymerization initiator, wherein the polymer comprises a repeating unit represented by formula (1) and (2a), and wherein R5 of formula (2a) is an organic group with free radical polymerizable group and a carbon number of 2 to 18. In formula (1), R1, R2, R3, and R4 individually represent hydrogen or a C1-30 organic group, and n is 0, 1, or 2.
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Inventors:
Osamu Onishi
Yoshio Ikeda
Yoshio Ikeda
Application Number:
JP2014101826A
Publication Date:
October 03, 2018
Filing Date:
May 15, 2014
Export Citation:
Assignee:
Sumitomo Bakelite Co., Ltd.
International Classes:
G03F7/038; C08F8/14; C08F232/08; C08F290/12; G03F7/004; G03F7/027
Domestic Patent References:
| JP2006243564A | ||||
| JP2007206165A | ||||
| JP2008180992A | ||||
| JP2001183521A | ||||
| JP2001125272A | ||||
| JP2001187807A |
Foreign References:
| WO2011129182A1 |
Attorney, Agent or Firm:
Shinji Hayami