Title:
欠陥検出装置、欠陥検出方法及びプログラム
Document Type and Number:
Japanese Patent JP6402531
Kind Code:
B2
Inventors:
Yasuaki Nagata
Yugo Sato
Yugo Sato
Application Number:
JP2014163794A
Publication Date:
October 10, 2018
Filing Date:
August 11, 2014
Export Citation:
Assignee:
Nippon Steel & Sumitomo Metal Corporation
International Classes:
G01N29/26
Domestic Patent References:
| JP2002924A | ||||
| JP2006047026A |
Foreign References:
| WO2014007023A1 | ||||
| US20100101326 |
Attorney, Agent or Firm:
Takayoshi Kokubun