Title:
液状物充填装置
Document Type and Number:
Japanese Patent JP6404745
Kind Code:
B2
Inventors:
Osamu Imai
Application Number:
JP2015035639A
Publication Date:
October 17, 2018
Filing Date:
February 25, 2015
Export Citation:
Assignee:
Sumitomo Precision Products Co., Ltd.
International Classes:
H01L21/288; B05C5/00; B05C9/12; B05C11/10; B05C15/00; B22D18/04; B22D19/00; H01L21/3205; H01L21/768
Domestic Patent References:
| JP2013077806A | ||||
| JP2014175529A | ||||
| JP2005142562A | ||||
| JP2005539369A | ||||
| JP2010514220A | ||||
| JP9059795A | ||||
| JP2001234395A |
Attorney, Agent or Firm:
Satoshi Murakami