Title:
検査装置、検査方法およびプログラム
Document Type and Number:
Japanese Patent JP6405124
Kind Code:
B2
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Inventors:
Mayumi Norimasa
Application Number:
JP2014119105A
Publication Date:
October 17, 2018
Filing Date:
June 09, 2014
Export Citation:
Assignee:
Keyence Corporation
International Classes:
G01N21/88; G01B11/02; G01B11/24; G01B11/30
Domestic Patent References:
| JP2007206797A | ||||
| JP2011141260A | ||||
| JP2012185160A | ||||
| JP2013205202A | ||||
| JP2013186100A | ||||
| JP2012021914A | ||||
| JP2012021919A | ||||
| JP2014500484A | ||||
| JP2013174547A | ||||
| JP2010216838A |
Foreign References:
| US20120223937 |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Takashi Sakamoto
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Takashi Sakamoto