Title:
弾性波デバイス及びその製造方法
Document Type and Number:
Japanese Patent JP6407102
Kind Code:
B2
Inventors:
Kurihara friend
Junpei Konno
Seiji Imasu
Junpei Konno
Seiji Imasu
Application Number:
JP2015117507A
Publication Date:
October 17, 2018
Filing Date:
June 10, 2015
Export Citation:
Assignee:
TAIYO YUDEN CO.,LTD.
International Classes:
H03H9/25; H01L21/60; H03H3/08
Domestic Patent References:
| JP2001298342A | ||||
| JP2010034527A | ||||
| JP2006203149A | ||||
| JP11008270A | ||||
| JP2008021751A | ||||
| JP2008066363A | ||||
| JP6333982A | ||||
| JP64081264A | ||||
| JP8148495A | ||||
| JP2004158701A |
Foreign References:
| WO2014033977A1 |
Attorney, Agent or Firm:
Shuhei Katayama