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Patent Searching and Data


Title:
CMUTデバイス製造方法、CMUTデバイス、及び装置
Document Type and Number:
Japanese Patent JP6416232
Kind Code:
B2
Inventors:
Dirksen, Peter
Muldel, Marcel
Leeustein, Adrien
Application Number:
JP2016516522A
Publication Date:
October 31, 2018
Filing Date:
September 15, 2014
Export Citation:
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Assignee:
KONINKLIJKE PHILIPS N.V.
International Classes:
H04R31/00; B81B3/00; B81C1/00; H01L29/84; H04R19/00
Domestic Patent References:
JP2015508625A
JP2005207959A
JP2013065983A
JP2008213057A
JP2010263444A
JP2008510324A
Foreign References:
WO2013005486A1
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Shinsuke Onuki