Title:
計測装置、および物品の製造方法
Document Type and Number:
Japanese Patent JP6417099
Kind Code:
B2
Abstract:
A measuring apparatus, for measuring a shape of an object to be measured, comprises an emitting unit (2) configured to emit pattern light, an optical system (3) configured to guide the pattern light emitted from the emitting unit to the object, a deflection unit (4) arranged between the optical system and the object and configured to deflect the pattern light emitted from the optical system, an image sensing unit (5) configured to capture the object via the optical system and the deflection unit, and a processing unit (7) configured to determine the shape of the object based on an image of the object captured by the image sensing unit, wherein the deflection unit comprises a diffraction grating configured to diffract the pattern light emitted from the optical system. In one embodiment the distance between the diffraction grating and the object is changed in order to vary the projected pattern. In another embodiment the diffraction grating is a polarizing diffraction grating and the emitting unit further comprises a polarization convertor, such that the projected pattern can be varied.
More Like This:
| JP5643645 | Systems and methods for 3D measurement of the shape of tangible objects |
| JPH061164 | Solid form measuring device |
| WO/2009/024758 | NON-CONTACT PROBE |
Inventors:
Nakajima Masaki
Application Number:
JP2014050532A
Publication Date:
October 31, 2018
Filing Date:
March 13, 2014
Export Citation:
Assignee:
Canon Inc
International Classes:
G01B11/25
Domestic Patent References:
| JP201293235A | ||||
| JP2013113581A | ||||
| JP63148106A | ||||
| JP2007155379A |
Foreign References:
| US20080317334 |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu