Title:
磁気ディスク用基板の製造方法及び磁気ディスクの製造方法
Document Type and Number:
Japanese Patent JP6420260
Kind Code:
B2
Abstract:
The present invention provides a manufacturing method for a magnetic disk-use glass substrate which can sufficiently reduce substrate surface defects by suppressing the remains of washing off abrasive grains. In the present invention, a circular plate-shaped substrate is sandwiched using a pair of platens for which polishing pads have been deployed on the surface thereof, a polishing fluid which includes colloidal silica as abrasive grains is supplied to the polishing surfaces, and the main surfaces of the circular plate-shaped substrate are polished. The polishing fluid includes, as an additive, the following substance which comprises a specified amide group or urea group. R1-NH-CO-R2 In the formula, R1 represents an alkyl group or a hydrogen atom, R2 represents an alkyl group or -NH-R3, and R3 represents an alkyl group.
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Inventors:
Tokumitsu Shuzo
Kota Hara
Kota Hara
Application Number:
JP2015560072A
Publication Date:
November 07, 2018
Filing Date:
February 02, 2015
Export Citation:
Assignee:
HOYA CORPORATION
International Classes:
G11B5/84; B24B37/00; C09K3/14
Domestic Patent References:
| JP2012140523A | ||||
| JP2011104694A | ||||
| JP2003173518A | ||||
| JP2013082612A |
Attorney, Agent or Firm:
Takeshi Otsuka
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