Title:
光学観察装置及び光学観察方法
Document Type and Number:
Japanese Patent JP6420600
Kind Code:
B2
More Like This:
Inventors:
Yutaka Miki
Application Number:
JP2014178284A
Publication Date:
November 07, 2018
Filing Date:
September 02, 2014
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G02B21/00
Domestic Patent References:
| JP2012526977A | ||||
| JP10221607A | ||||
| JP62024215A | ||||
| JP2008289863A | ||||
| JP2002022414A |
Foreign References:
| US20120019821 |
Attorney, Agent or Firm:
Shigeki Orizaka