Title:
発振器およびリアルタイムクロック用途のための複合バネＭＥＭＳ共振器
Document Type and Number:
Japanese Patent JP6421239
Kind Code:
B2
Abstract:
A compound spring MEMS resonator includes a resonator body constructed using one or more spring unit cells forming a compound spring block and one or more compound spring blocks forming the resonator body. Each compound spring block is anchored at nodal points to ensure a high quality factor. The resonator body further includes masses attached to the open ends of the compound spring block and capacitively coupled to drive/sense electrodes. The dimensions of the spring unit cells, the number of spring unit cells for a compound spring block, the size and weight of the masses, and the length and width of the support beams are selected to realize a desired resonant frequency. Meanwhile, the number of compound spring blocks is selected to tune the desired electrical characteristics, such as impedance, of the MEMS resonator.
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Inventors:
Clark John Ryan
Application Number:
JP2017519315A
Publication Date:
November 07, 2018
Filing Date:
October 16, 2015
Export Citation:
Assignee:
Microchip Technology Incorporated
International Classes:
H03H9/24; B81B3/00
Domestic Patent References:
| JP2006121653A | ||||
| JP46020675B1 | ||||
| JP2005510108A | ||||
| JP7131280A |
Foreign References:
| US7616077 | ||||
| US7750759 | ||||
| WO2008146244A1 |
Other References:
Jize Yan, et al.,Suppression of parasitic resonance in piezoresistively transduced longitudinal mode MEMS resonators,Ultrasonics Symposium(IUS), 2009 IEEE International ,IEEE,2009年 9月23日,pp.2149-2152
Attorney, Agent or Firm:
Meisei International Patent Office
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