Title:
プラズマエッチング方法
Document Type and Number:
Japanese Patent JP6421480
Kind Code:
B2
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Inventors:
Matsuura Go
Application Number:
JP2014146506A
Publication Date:
November 14, 2018
Filing Date:
July 17, 2014
Export Citation:
Assignee:
Zeon Corporation
International Classes:
H01L21/3065; H01L21/3213; H01L21/768
Domestic Patent References:
| JP5299388A | ||||
| JP2011258803A | ||||
| JP5343366A | ||||
| JP2012164766A |
Attorney, Agent or Firm:
Haruhito Oishi