Title:
切削溝の形成方法
Document Type and Number:
Japanese Patent JP6422388
Kind Code:
B2
Abstract:
A cut groove having a predetermined depth is formed with a cutting blade along a projected dicing line set on a workpiece. A first preliminary groove is cut in a measurement member and a relational expression with respect to a distance from the preliminary groove bottom and the width of the preliminary groove is determined. An amount of incision into the workpiece is set to be equal to or smaller than a predetermined value from a reference position and the thickness of the workpiece. A second preliminary groove is cut along the projected dicing line, and an image of the second preliminary cut groove is captured. The width of the second preliminary cut groove is measured, and the depth of the second preliminary cut groove is calculated from the width of the second preliminary groove and the relational expression.
Inventors:
Atsushi Komatsu
Atsushi Takagi
Atsushi Takagi
Application Number:
JP2015080297A
Publication Date:
November 14, 2018
Filing Date:
April 09, 2015
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301
Domestic Patent References:
| JP2011181623A | ||||
| JP2005136292A | ||||
| JP6252260A | ||||
| JP2005142202A | ||||
| JP5152435A | ||||
| JP2012227487A | ||||
| JP2003168655A |
Foreign References:
| US6357330 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Tomohiro Okamoto