Title:
ポリマー薄膜にディジタル式のマイクロスケールのパターンを連続的に製造する方法
Document Type and Number:
Japanese Patent JP6424029
Kind Code:
B2
Abstract:
A liquid thin film is disposed on a conveyor surface (e.g., a roller or belt) that moves the thin film into a precisely controlled gap (or nip) region in which the liquid thin film is subjected to an electric field that causes the liquid to undergo Electrohydrodynamic (EHD) patterning deformation, whereby portions of the liquid thin film form patterned liquid features having a micro-scale patterned shape. A curing mechanism (e.g., a UV laser) is used to solidify (e.g., in the case of polymer thin films, crosslink) the patterned liquid inside or immediately after exiting the gap region. The patterned structures are either connected by an intervening web as part of a polymer sheet, or separated into discreet micro-scale structures. Nanostructures (e.g., nanotubes or nanowires) disposed in the polymer become vertically oriented during the EHD patterning process. Segmented electrodes and patterned charges are utilized to provide digital patterning control.
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Inventors:
David Matthew Johnson
Armin Earl Volkel
John S. Paskewitz
Armin Earl Volkel
John S. Paskewitz
Application Number:
JP2014140427A
Publication Date:
November 14, 2018
Filing Date:
July 08, 2014
Export Citation:
Assignee:
Palo Alto Research Center Incorporated
International Classes:
B29C59/00; G02B1/10; H01L21/027
Domestic Patent References:
| JP2007050518A | ||||
| JP2007062095A |
Attorney, Agent or Firm:
Atsushi Nakajima
Kato Kazunori
Kato Kazunori