Title:
アルミニウム前駆体と、それを用いた薄膜及びキャパシタの形成方法
Document Type and Number:
Japanese Patent JP6427322
Kind Code:
B2
Abstract:
An aluminum compound is represented by following Formula 1. In Formula 1, X is a functional group represented by following Formula 2 or Formula 3.
Inventors:
Youn Chul
Atsushi Sakurai
Hatase Masako
Cho Yong
Ginger Chi Na
Naoki Yamada
Choi Akira
Atsushi Sakurai
Hatase Masako
Cho Yong
Ginger Chi Na
Naoki Yamada
Choi Akira
Application Number:
JP2014031269A
Publication Date:
November 21, 2018
Filing Date:
February 21, 2014
Export Citation:
Assignee:
Samsung Electronics Co.,Ltd.
International Classes:
H01L21/316; C07C31/32; C07C49/92; C07F5/06; C23C16/18; C23C16/40; H01L21/8242; H01L27/108
Domestic Patent References:
| JP2010502541A | ||||
| JP2009088236A | ||||
| JP2004002864A | ||||
| JP11500789A | ||||
| JP2004056142A | ||||
| JP2014005242A | ||||
| JP2005534809A | ||||
| JP2013089846A |
Foreign References:
| WO2013105310A1 |
Other References:
Chemical Vapor Deposition,2001年,Vol.7, No.2, p.69-74
Surface and Coatings Technology,2002年,Vol.160, No.2-3,p.124-131
Surface and Coatings Technology,2002年,Vol.160, No.2-3,p.124-131
Attorney, Agent or Firm:
Kyosei International Patent Office