Title:
搬送設備
Document Type and Number:
Japanese Patent JP6428575
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a conveyance facility capable of constructing a facility at low cost without needing high flexible cables even while maintaining high cleanliness without any intrusion of foreign substances such as dusts into a housing container for housing a substrate.SOLUTION: During transfer of a housing container 20 between conveyance truck 50 and a storage shelf 13, a container pad 28 for supplying power in non-contact to an FFU 24 that blows air into the housing container 20 moves away from both a conveyance truck pad 58 and a storage shelf pad 18 to stop the air blowing. However, while the air blowing is stopped, cleanliness is maintained in the housing container 20 by preventing intrusion of external dust by inner pressure increased in the housing container 20 by the FFU 24.SELECTED DRAWING: Figure 6
Inventors:
Kazuhiro Torimoto
Keiji Shibata
Keiji Shibata
Application Number:
JP2015225234A
Publication Date:
November 28, 2018
Filing Date:
November 18, 2015
Export Citation:
Assignee:
Daifuku Co., Ltd.
International Classes:
B65G1/00; B65G1/04; H01L21/673
Domestic Patent References:
| JP200868964A | ||||
| JP2002261159A | ||||
| JP2002170874A | ||||
| JP200868963A | ||||
| JP62121125A | ||||
| JP2001343621A |
Attorney, Agent or Firm:
Morimoto International Patent Office