Title:
堆積チャンバ向けの冷却式の反射性のアダプタプレート
Document Type and Number:
Japanese Patent JP6429170
Kind Code:
B2
Abstract:
In one embodiment, an adapter plate for a deposition chamber is provided. The adapter plate comprises a body, a mounting plate centrally located on the body, a first annular portion extending longitudinally from a first surface of the mounting plate and disposed radially inward from an outer surface of the mounting plate, a second annular portion extending longitudinally from an opposing second surface of the mounting plate and disposed radially inward from the outer surface of the mounting plate, and a mirror-finished surface disposed on the interior of the second annular portion, the mirror-finished surface having an average surface roughness of 6 Ra or less.
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Inventors:
Goal assisi
Subra Mani Anansa
Evert Maurice E
Subra Mani Anansa
Evert Maurice E
Application Number:
JP2015508977A
Publication Date:
November 28, 2018
Filing Date:
March 21, 2013
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
C23C14/34
Domestic Patent References:
| JP10012551A | ||||
| JP2010166033A | ||||
| JP2008227001A | ||||
| JP9167742A | ||||
| JP8315965A | ||||
| JP62270765A |
Foreign References:
| US6780294 | ||||
| US20060032741 | ||||
| US20110217848 | ||||
| US20050121143 |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo
Nobuhiko Suzuki
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo
Nobuhiko Suzuki