Title:
イオン装置で利用する磁石およびイオン装置
Document Type and Number:
Japanese Patent JP6429407
Kind Code:
B2
Abstract:
A magnet having an annular coolant fluid passage is generally described. Various examples provide a magnet including a first magnet and a second magnet disposed around an ion beam coupler with an aperture there through. The first and second magnets each including a metal core having a cavity therein, one or more conductive wire wraps disposed around the metal core, and an annular core element configured to be inserted into the cavity, wherein an annular coolant fluid passage is formed between the cavity and the annular core element. Furthermore, the annular core element may have a first diameter and a middle section having a second diameter, the second diameter being less than the first diameter. Other embodiments are disclosed and claimed.
Inventors:
Rose Crow, Scott
Buff, James S.
Buff, James S.
Application Number:
JP2016519682A
Publication Date:
November 28, 2018
Filing Date:
June 13, 2014
Export Citation:
Assignee:
Varian Semiconductor Equipment Associates, Inc.
International Classes:
H01J37/141; H01L43/12
Domestic Patent References:
| JP2005533353A | ||||
| JP2009164326A | ||||
| JP2004228289A | ||||
| JP4255656A | ||||
| JP2009118713A | ||||
| JP56108216U | ||||
| JP5190345A | ||||
| JP4323811A | ||||
| JP8064426A | ||||
| JP2010258244A | ||||
| JP2003115414A | ||||
| JP2012256763A | ||||
| JP2000090870A |
Foreign References:
| US20120075047 | ||||
| US20110309905 | ||||
| GB167916A | ||||
| CN201796681U | ||||
| CN103714948A |
Attorney, Agent or Firm:
Longhua International Patent Service Corporation