Title:
整合器及び整合方法
Document Type and Number:
Japanese Patent JP6429419
Kind Code:
B2
Abstract:
A matching device includes: a directional coupler that detects a traveling wave and a reflected wave; a matching circuit that has a first variable capacitance capacitor, a second variable capacitance capacitor and an inductance; and a control unit that calculates a reflection coefficient based on the traveling wave and the reflected wave and controls a capacitance value VC1 of the first variable capacitance capacitor and a capacitance value VC2 of the second variable capacitance capacitor. The control unit changes VC2 such that VC2 moves toward a circle drawn by the trajectory of the reflection coefficient passing through a matching point on a Smith chart, fine-tunes VC1 on the basis of a predicted intersection point with the circle, and when the distance between the calculated reflection coefficient and the circle becomes a predetermined value or less, changes VC1 such that the calculated reflection coefficient approaches zero, and fine-tunes VC2.
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Inventors:
Naoya Fujimoto
Yoshiyuki Oshida
Noriichi Kato
Yoshiyuki Oshida
Noriichi Kato
Application Number:
JP2017502039A
Publication Date:
November 28, 2018
Filing Date:
February 08, 2016
Export Citation:
Assignee:
Hitachi Kokusai Electric Co., Ltd.
International Classes:
H03H7/40; H03H7/52; H03H11/30; H05H1/46
Domestic Patent References:
JP2001274651A |
Foreign References:
WO2014037994A1 | ||||
WO2014203346A1 | ||||
US20100225411 |