Title:
リターディングを用いたエネルギーアナライザ・モノクロメータ
Document Type and Number:
Japanese Patent JP6432905
Kind Code:
B2
Abstract:
PURPOSE: To provide an energy analyzer/monochrometer using the retarding which allows for selection of a desired energy electron beam, by inserting into an energy selection slit, while minimizing the impact of aberration due to retarding, between a deceleration lens and a filter, or between the filter and an acceleration lens.CONSTITUTION: A deceleration lens, a filter and an acceleration lens are provided, first focus of an electron beam is set in the deceleration lens, second and third focuses of the electron bean after passing the filter are set between the filter and acceleration lens and in the acceleration lens or after passage thereof. Impact of aberration is reduced between the deceleration lens and filter, and between the filter and acceleration lens thus improving energy resolution.SELECTED DRAWING: Figure 1
Inventors:
Katsushige Tsuno
Kimura Keiko
Hideki Yoshikawa
Kimura Keiko
Hideki Yoshikawa
Application Number:
JP2014266881A
Publication Date:
December 05, 2018
Filing Date:
December 27, 2014
Export Citation:
Assignee:
Apco Co., Ltd.
National Institute for Materials Science
National Institute for Materials Science
International Classes:
H01J37/05; H01J37/12; H01J37/28
Other References:
津野勝重,"偏極電子ビームを作るためのウィーンフィルタ設計",第一回 軌道角運動量を持つ電子ビームに関する研究会,2014年 3月18日,Whole Document,[平成30年8月3日検索]、インターネット,URL,http://www.geocities.jp/eostsuno/pdf/2014_q-filter_VoltexBeam_KyotoUniv.pdf
Attorney, Agent or Firm:
Morihiro Okada