Title:
小型装置保守機構
Document Type and Number:
Japanese Patent JP6432936
Kind Code:
B2
Inventors:
Shiro Hara
Hisato Ogiso
Nakano Zen
Kamei Ryuichiro
Yabuta Courage
Hisashi Mizuguchi
Asahiko Kato
Masayoshi Kure
Son U
Hisato Ogiso
Nakano Zen
Kamei Ryuichiro
Yabuta Courage
Hisashi Mizuguchi
Asahiko Kato
Masayoshi Kure
Son U
Application Number:
JP2014244229A
Publication Date:
December 05, 2018
Filing Date:
December 02, 2014
Export Citation:
Assignee:
National Institute of Advanced Industrial Science and Technology
Seinan Industry Co., Ltd.
Seinan Industry Co., Ltd.
International Classes:
C23C14/50; C23C14/00
Domestic Patent References:
| JP8100260A | ||||
| JP3219075A | ||||
| JP2000178712A | ||||
| JP2009228105A | ||||
| JP2001316797A | ||||
| JP11061386A |
Foreign References:
| WO2012029775A1 |
Attorney, Agent or Firm:
Patent Business Corporation Takewa International Patent Office
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