Title:
形状計測装置、加工装置及び形状計測装置の校正方法
Document Type and Number:
Japanese Patent JP6444783
Kind Code:
B2
Inventors:
Koichi Ichihara
Application Number:
JP2015055076A
Publication Date:
December 26, 2018
Filing Date:
March 18, 2015
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
G01B11/24; B24B49/12
Domestic Patent References:
| JP2010181195A | ||||
| JP2000258227A | ||||
| JP2010076961A | ||||
| JP2009210151A | ||||
| JP11043928A | ||||
| JP10005996A | ||||
| JP2006105762A | ||||
| JP2010107262A | ||||
| JP2006337112A | ||||
| JP2009041983A | ||||
| JP2007078486A | ||||
| JP60184680A |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito